DIAMETER: 4.345″+/-.002″
THICKNESS: 0.250″+/-.010″
PARALLELISM: 0.005″ MAXIMUM T.I.R.
FLATNESS: 0.0004″ PER INCH MAXIMUM, 2 FACES.
EDGE BEVEL: 0.060″+/-.005″ X 45deg, 1 PLACE
0.030″+/-.005″ X 45deg, 1 PLACE
SURFACE QUALITY: 40-20 PER MIL-O-13830, 2 FACES.
EDGE AND BEVEL FINISH: 320 MESH.
MATERIAL TYPE/QUALITY: FUSED SILICA, CORNING 7980
0G GRADE. 80.0% MINIMUM
TRANSMITTANCE AT 185nm.
INCLUSION CLASS 0
TOTAL INCLUSION CROSS-
SECTION 0.00 – 0.03mm Sq.
MAXIMUM INCLUSION CROSS-
SECTION 0.10mm.
INDEX HOMOGENEITY GRADE A
WITH 1ppm MAXIMUM.
COATING: A/R COATED FOR < 1.0% R FROM 200nm-280nm